Landron, Claude (1981) Application de la microanalyse a l'étude des couches minces. Accademia Peloritana dei Pericolanti - Classe di Scienze FF.MM.NN., LIX (1). pp. 97-103.
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Abstract
The purpose of this work is to describe a direct method of obtaining results concerning amorphous thin film microanalysis ofrm the Boltzmann transport equation. Several methods such as Monte Carlo calculations have been developed. This paper discusses applicability of a theoritical interaction model to the research of element concentration in thin film. In the electron probe microanalyser an electron beam falls on the surface of a target. The ratio of measured X ray intensities from specimen and standard give an approximate value of the composition of the specimen. This method is compred with Monte Carlo calculations which require much computation time because a great number of trajectories into the target are simulated to reduce statistical error. The proposed relation may be satisfactorily applied to a wide range of microanalysis conditions.
Item Type: | Article |
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Subjects: | M.U.S. - Miscellanea > Atti Accademia Peloritana > Classe di Scienze Fisiche, Matematiche e Naturali > 1981 M.U.S. - Miscellanea > Atti Accademia Peloritana > Classe di Scienze Medico-Biologiche > 1981 M.U.S. - Miscellanea > Atti Accademia Peloritana > Classe di Scienze Giuridiche, Economiche e Politiche > 1981 M.U.S. - Miscellanea > Atti Accademia Peloritana > Classe di Lettere Filosofia e belle Arti > 1981 |
Depositing User: | Dr PP C |
Date Deposited: | 09 Oct 2012 09:23 |
Last Modified: | 09 Oct 2012 09:23 |
URI: | http://cab.unime.it/mus/id/eprint/1125 |
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